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STL Inspection


Inspection Tool All wafer sizes

  • Read Bar Code

  • Read wafer ID

  • Identify Die with effects

  • Identify Die with contamination

  • Measure CDs

  • Measure Overlay

  • Check for bad exposure contrast

  • Tool can be single or double carrier

  • Tool can run any wafer size

  • Stage can be added for faster throughput

  • Fully automatic - takes away need for an operator

Find out more
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